Original paper
Large-area metasurface on CMOS-compatible fabrication platform: driving flat optics from lab to fab
Abstract
A metasurface is a layer of subwavelength-scale nanostructures that can be used to design functional devices in ultrathin form. Various metasurface-based optical devices – coined as flat optics devices – have been realized with distinction performances in research laboratories using electron beam lithography. To make such devices mass producible at low cost, metasurfaces over a large area have also been defined with lithography steppers and...
Paper Details
Title
Large-area metasurface on CMOS-compatible fabrication platform: driving flat optics from lab to fab
Published Date
Apr 22, 2020
Journal
Volume
9
Issue
10
Pages
3071 - 3087
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Notes
History