information about Electron-beam lithography field
Field Hierarchy
| Parent | |||
|---|---|---|---|
Medicine 49.4M papers | Chemistry 28.9M papers | Materials science 18.5M papers | Organic chemistry 12.9M papers |
Pathology 9.1M papers | Composite material 8.7M papers | Nanotechnology 4.1M papers | Alternative medicine 2.4M papers |
Layer (electronics) 1.4M papers | Fabrication 344k papers | ||
| Current | |||
Electron-beam lithography 21k papers | |||
| Child | |||
Next-generation lithography 4,612 papers | Proximity effect (electron beam lithography) 2,933 papers | Maskless lithography 1,997 papers | Stencil lithography 1,654 papers |
Hydrogen silsesquioxane 634 papers | |||
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History