Fabrication

https://www.wikidata.org/wiki/Q5428139

Field Hierarchy

Parent
Medicine 49.4M papers	Pathology 9.1M papers	Alternative medicine 2.4M papers
Current
Fabrication 344k papers
Child
Electron-beam lithography 21k papers	Surface micromachining 17.9k papers	Nanolithography 13.3k papers	Microfabrication 12.6k papers
X-ray lithography 5,391 papers	Nanoimprint lithography 5,245 papers	Next-generation lithography 4,612 papers	LIGA 4,474 papers
Soft lithography 3,290 papers		Gauge factor 3,281 papers

Trends

Notes

History