information about Resist field
Field Hierarchy
| Parent | |||
|---|---|---|---|
Chemistry 28.9M papers | Materials science 18.5M papers | Organic chemistry 12.9M papers | Composite material 8.7M papers |
Nanotechnology 4.1M papers | Layer (electronics) 1.4M papers | ||
| Current | |||
Resist 51.9k papers | |||
| Child | |||
Electron-beam lithography 21k papers | X-ray lithography 5,391 papers | Photomask 4,670 papers | Next-generation lithography 4,612 papers |
Multiple patterning 3,481 papers | Immersion lithography 3,115 papers | Proximity effect (electron beam lithography) 2,933 papers | Maskless lithography 1,997 papers |
Computational lithography 1,974 papers | Stencil lithography 1,654 papers | ||
Trends
Notes
History