information about Resist field
Field Hierarchy
| Parent | |||
|---|---|---|---|
Chemistry 29.4M papers | Materials science 19M papers | Organic chemistry 13.1M papers | Composite material 8.9M papers |
Nanotechnology 4.2M papers | Layer (electronics) 1.4M papers | ||
| Current | |||
Resist 52.5k papers | |||
| Child | |||
Electron-beam lithography 21.2k papers | X-ray lithography 5,443 papers | Photomask 4,757 papers | Next-generation lithography 4,675 papers |
Multiple patterning 3,530 papers | Immersion lithography 3,136 papers | Proximity effect (electron beam lithography) 2,966 papers | Maskless lithography 2,027 papers |
Computational lithography 2,011 papers | Stencil lithography 1,662 papers | ||
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History