Silicon-content-dependent microstructures and mechanical behavior of (AlCrTiZrMo)-Six-N high-entropy alloy nitride films

The multi-component (AlCrTiZrMo)-Six-N high-entropy films with different silicon contents were deposited on the silicon substrate by magnetron sputtering. The influence of silicon contents on the structures and properties of the films was studied by means of X-ray diffraction (XRD), scanning electron microscopy (SEM), high-resolution transmission electron microscopy (HRTEM), electron probe microanalyzer (EPMA) and nanoindentation. The results...