Sputtering

https://www.wikidata.org/wiki/Q898444

Field Hierarchy

Parent
Physics 32.4M papers	Materials science 18.8M papers	Quantum mechanics 13.4M papers	Nanotechnology 4.3M papers
Thin film 508k papers
Current
Sputtering 129k papers
Child
Sputter deposition 69.1k papers	Cavity magnetron 19.7k papers	High-power impulse magnetron sputtering 5,384 papers	Pulsed DC 2,027 papers
Collision cascade 1,184 papers

Trends

Notes

History