information about Sputtering field
Field Hierarchy
Parent | |||
---|---|---|---|
Physics 33.6M papers | Materials science 19M papers | Quantum mechanics 13.6M papers | Nanotechnology 4.2M papers |
Thin film 517k papers | |||
Current | |||
Sputtering 131k papers | |||
Child | |||
Sputter deposition 69.4k papers | Cavity magnetron 20.2k papers | High-power impulse magnetron sputtering 5,583 papers | Pulsed DC 2,121 papers |
Collision cascade 1,192 papers |
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History