Sputtering

https://www.wikidata.org/wiki/Q898444

Field Hierarchy

Parent
Physics 33M papers	Materials science 18.5M papers	Quantum mechanics 13.3M papers	Nanotechnology 4.1M papers
Thin film 509k papers
Current
Sputtering 129k papers
Child
Sputter deposition 68.4k papers	Cavity magnetron 19.9k papers	High-power impulse magnetron sputtering 5,430 papers	Pulsed DC 2,093 papers
Collision cascade 1,180 papers

Trends

Notes

History