information about Sputter deposition field
Field Hierarchy
Parent | |||
---|---|---|---|
Physics 33.6M papers | Materials science 19M papers | Quantum mechanics 13.6M papers | Nanotechnology 4.2M papers |
Thin film 517k papers | Sputtering 131k papers | ||
Current | |||
Sputter deposition 69.4k papers | |||
Child | |||
High-power impulse magnetron sputtering 5,583 papers | Pulsed DC 2,121 papers |
Trends
Notes
History