Sputter deposition

https://www.wikidata.org/wiki/Q847609

Field Hierarchy

Parent
Physics 33M papers	Materials science 18.5M papers	Quantum mechanics 13.3M papers	Nanotechnology 4.1M papers
Thin film 509k papers		Sputtering 129k papers
Current
Sputter deposition 68.4k papers
Child
High-power impulse magnetron sputtering 5,430 papers		Pulsed DC 2,093 papers

Trends

Notes

History