Original paper
Green chemical mechanical polishing of sapphire wafers using a novel slurry
Abstract
Toxic and corrosive solutions are widely used in the preparation of abrasives and chemical mechanical polishing (CMP) of sapphire wafers, resulting in potential environmental...
Paper Details
Title
Green chemical mechanical polishing of sapphire wafers using a novel slurry
Published Date
Jan 1, 2020
Journal
Volume
12
Issue
44
Pages
22518 - 22526