information about Chemical-mechanical planarization field
Field Hierarchy
Parent | |||
---|---|---|---|
Chemistry 28.9M papers | Engineering 25M papers | Materials science 18.5M papers | Organic chemistry 12.9M papers |
Composite material 8.7M papers | Mechanical engineering 5.5M papers | Metallurgy 4.8M papers | Nanotechnology 4.1M papers |
Layer (electronics) 1.4M papers | Polishing 36.5k papers | ||
Current | |||
Chemical-mechanical planarization 11.6k papers | |||
Child | |||
Ammonium dodecyl sulfate 0 papers | Copper damascene 0 papers |
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