Submicron-patterning of bulk titanium by nanoimprint lithography and reactive ion etching
Abstract
Nanopatterns on titanium may enhance endosseous implant biofunctionality. To enable biological studies to prove this hypothesis, we developed a scalable method of fabricating nanogrooved titanium substrates. We defined nanogrooves by nanoimprint lithography (NIL) and a subsequent pattern transfer to the surface of ASTM grade 2 bulk titanium applying a soft-mask for chlorine-based reactive ion etching (RIE). With respect to direct write...
Paper Details
Title
Submicron-patterning of bulk titanium by nanoimprint lithography and reactive ion etching
Published Date
Jan 17, 2012
Journal
Volume
23
Issue
6
Pages
065306 - 065306
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