information about Reactive-ion etching field
Field Hierarchy
| Parent | |||
|---|---|---|---|
Chemistry 29.1M papers | Materials science 18.8M papers | Organic chemistry 13.1M papers | Composite material 8.9M papers |
Nanotechnology 4.3M papers | Layer (electronics) 1.4M papers | Etching (microfabrication) 97.9k papers | |
| Current | |||
Reactive-ion etching 18.4k papers | |||
| Child | |||
Deep reactive-ion etching 3,209 papers | Buffered oxide etch 398 papers | ||
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