Etching (microfabrication)

https://www.wikidata.org/wiki/Q2368605

Field Hierarchy

Parent
Chemistry 29.1M papers	Materials science 18.8M papers	Organic chemistry 13.1M papers	Composite material 8.9M papers
Nanotechnology 4.3M papers		Layer (electronics) 1.4M papers
Current
Etching (microfabrication) 97.9k papers
Child
Reactive-ion etching 18.4k papers	Isotropic etching 14.3k papers	Plasma etching 10.6k papers	Dry etching 10.3k papers
Deep reactive-ion etching 3,209 papers	Interposer 2,983 papers	Etch pit density 2,393 papers	LOCOS 1,555 papers
Buffered oxide etch 398 papers

Trends

Notes

History