Etching (microfabrication)

https://www.wikidata.org/wiki/Q2368605

Field Hierarchy

Parent
Chemistry 28.9M papers	Materials science 18.5M papers	Organic chemistry 12.9M papers	Composite material 8.7M papers
Nanotechnology 4.1M papers		Layer (electronics) 1.4M papers
Current
Etching (microfabrication) 97.4k papers
Child
Reactive-ion etching 18.4k papers	Isotropic etching 14.1k papers	Plasma etching 10.5k papers	Dry etching 10.4k papers
Deep reactive-ion etching 3,202 papers	Interposer 2,772 papers	Etch pit density 2,372 papers	LOCOS 1,827 papers
Buffered oxide etch 405 papers

Trends

Notes

History