Controlled grain-size thermochromic VO2 coatings by the fast oxidation of sputtered vanadium or vanadium oxide films deposited at glancing angles

An original, simple and cost-effective oxidation strategy to attain thermochromic vanadium dioxide thin films is reported. This two-step procedure comprises the initial deposition of DC magnetron-sputtered vanadium or vanadium oxide films by the combination of glancing angle deposition and, if needed, reactive gas pulsing process, followed by fast oxidation of such layers in air atmosphere at high temperatures. Thanks to the careful control of...