Original paper
Shape classification of fumed silica abrasive and its effects on chemical mechanical polishing
Abstract
The performance of chemical mechanical polishing (CMP) was determined by the morphological characteristics of the abrasive particle. In this study, the shape of the aggregate of fumed silica was confirmed by a method of characterizing the morphology of the particles using transmission electron microscopy (TEM). Each aggregate was classified into four types—linear, branched, ellipsoidal, and spheroidal—and the shape distribution of a fumed-silica...
Paper Details
Title
Shape classification of fumed silica abrasive and its effects on chemical mechanical polishing
Published Date
Mar 1, 2021
Journal
Volume
381
Pages
451 - 458
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Notes
History