Flexible fabrication of optical glass micro-lens array by using contactless hot embossing process

This paper reported the fabrication of optical glass micro-lens array (MLA) by using contactless micro-embossing technology. Firstly, the micro-hole array in the tungsten carbide (WC) substrate was made by the micro-electrical discharge machining (micro-EDM). Then, to improve the oxidation resistance, anti-sticking properties and chemical inertness of mold surface, Cr-W-N coating was deposited on the mold insert by plasma-enhanced sputtering...