Flexible fabrication of optical glass micro-lens array by using contactless hot embossing process

Published on Sep 1, 2020in Journal of Manufacturing Processes4.086
· DOI :10.1016/J.JMAPRO.2020.07.019
Kangsen Li4
Estimated H-index: 4
(SZU: Shenzhen University),
Xinfang Huang4
Estimated H-index: 4
(USTL: University of Science and Technology, Liaoning)
+ 4 AuthorsFeng Gong11
Estimated H-index: 11
(SZU: Shenzhen University)
Abstract This paper reported the fabrication of optical glass micro-lens array (MLA) by using contactless micro-embossing technology. Firstly, the micro-hole array in the tungsten carbide (WC) substrate was made by the micro-electrical discharge machining (micro-EDM). Then, to improve the oxidation resistance, anti-sticking properties and chemical inertness of mold surface, Cr-W-N coating was deposited on the mold insert by plasma-enhanced sputtering technique. Finally, controllable MLA were fabricated with the coated EDM-mold by using the precision glass molding machine from Shenzhen University (SZU’s PGMM30). The surface roughness, three-dimensional morphology and optical performance of glass MLA were measured by ContourGT-X 3D optical profiler, ultraviolet spectrophotometer, and optical imaging system, respectively. The experimental results indicated that the contactless hot embossing process has the capability of fabricating high-quality and multi-scale glass MLA. This work provides an effective method for the fabrication of optical glass MLA.
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