Evaporated tellurium thin films for p-type field-effect transistors and circuits
Abstract
There is an emerging need for semiconductors that can be processed at near ambient temperature with high mobility and device performance. Although multiple n-type options have been identified, the development of their p-type counterparts remains limited. Here, we report the realization of tellurium thin films through thermal evaporation at cryogenic temperatures for fabrication of high-performance wafer-scale p-type field-effect transistors. We...
Paper Details
Title
Evaporated tellurium thin films for p-type field-effect transistors and circuits
Published Date
Dec 16, 2019
Journal
Volume
15
Issue
1
Pages
53 - 58
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