Hard yet tough CrN/Si3N4 multilayer coatings deposited by the combined deep oscillation magnetron sputtering and pulsed dc magnetron sputtering

Volume: 502, Pages: 144168 - 144168
Published: Feb 1, 2020
Abstract
Hard yet tough coatings with simultaneously high hardness and toughness represent a new class of high-performance coatings, which are vital for tribological applications due to the enhanced surface/interface properties. In this work, CrN/Si3N4 multilayer coatings with various Si content were reactively deposited by the combined deep oscillation magnetron sputtering and pulsed dc magnetron sputtering. The as-deposited coatings exhibit smooth...
Paper Details
Title
Hard yet tough CrN/Si3N4 multilayer coatings deposited by the combined deep oscillation magnetron sputtering and pulsed dc magnetron sputtering
Published Date
Feb 1, 2020
Volume
502
Pages
144168 - 144168
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