Hard yet tough CrN/Si3N4 multilayer coatings deposited by the combined deep oscillation magnetron sputtering and pulsed dc magnetron sputtering

Hard yet tough coatings with simultaneously high hardness and toughness represent a new class of high-performance coatings, which are vital for tribological applications due to the enhanced surface/interface properties. In this work, CrN/Si3N4 multilayer coatings with various Si content were reactively deposited by the combined deep oscillation magnetron sputtering and pulsed dc magnetron sputtering. The as-deposited coatings exhibit smooth...