doi.org/10.1016/j.vacuum.2018.01.011

Other

Cu films prepared by bipolar pulsed high power impulse magnetron sputtering

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,

..., D. N. Ruzic

Volume: 150, Pages: 216 - 221

Published: Jan 8, 2018

Paper Fields

Paper Details

Title

Cu films prepared by bipolar pulsed high power impulse magnetron sputtering

DOI

doi.org/10.1016/j.vacuum.2018.01.011

Published Date

Jan 8, 2018

Journal

Volume

150

Pages

216 - 221

Notes

History