Hierarchically structured re-entrant microstructures for superhydrophobic surfaces with extremely low hysteresis

This paper reports a new type of hierarchically structured surface consisting of re-entrant silicon micropillars with silicon nanowires atop for superhydrophobic surface with extremely low hysteresis. Re-entrant microstructures were fabricated on a silicon substrate through a customized one-mask microfabrication process while silicon nanopillars were created on the entire surface of microstructures, including sidewalls, by a...