Micro manipulation based on adhesion control with compound vibration

Due to scale effects, the releasing of micro objects has been a long-standing challenge in micromanipulation applications. In this paper a micromanipulation system is presented based on the adhesion control with compound vibration. This adhesion control technique employs inertia force to overcome adhesion force achieving 100% repeatability with releasing accuracy of 4±0.5μm, which was experimentally quantified through the manipulation of...