Microelectromechanical systems

https://www.wikidata.org/wiki/Q175561

Field Hierarchy

Parent
Physics 31.7M papers	Materials science 18.2M papers	Quantum mechanics 13.1M papers	Nanotechnology 4.2M papers
Optoelectronics 3.7M papers
Current
Microelectromechanical systems 62.8k papers
Child
Vibrating structure gyroscope 3,410 papers	Proof mass 2,262 papers	Stiction 2,049 papers	Rate integrating gyroscope 919 papers

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