Oxidation resistance and structural evolution of (TiVCrZrHf)N coatings

(TiVCrZrHf)N coatings were deposited on Si substrates by reactive magnetron sputtering system. Their oxidation behaviors and structure were studied after static oxidation tests in air at different temperatures. The evolution of the chemical composition, microstructure, nanohardness, and electrical resistivity of these coatings after annealing at different temperatures in air was systematically analyzed. The as-deposited coating showed continued...