Two-Step Deformation Mechanism of Self-Forming Three-Dimensional Carbon Micro Structures

We have developed a novel fabrication method for three-dimensional carbon micro structures using a carbon-microelectromechanical system (C-MEMS) and a thermomechanical deformation technique. Three-dimensional carbon micro structures could be fabricated as pyrolyzed SU-8 film with sputtered Au layer. The SU-8 film with sputtered Au layer was deformed autonomously by thermal deformation. Fabrication of three dimensional structures from two...