Original paper
Two-Step Deformation Mechanism of Self-Forming Three-Dimensional Carbon Micro Structures
Volume: 49, Issue: 6S, Pages: 06GN03 - 06GN03
Published: Jun 1, 2010
Abstract
We have developed a novel fabrication method for three-dimensional carbon micro structures using a carbon-microelectromechanical system (C-MEMS) and a thermomechanical deformation technique. Three-dimensional carbon micro structures could be fabricated as pyrolyzed SU-8 film with sputtered Au layer. The SU-8 film with sputtered Au layer was deformed autonomously by thermal deformation. Fabrication of three dimensional structures from two...
Paper Details
Title
Two-Step Deformation Mechanism of Self-Forming Three-Dimensional Carbon Micro Structures
Published Date
Jun 1, 2010
Volume
49
Issue
6S
Pages
06GN03 - 06GN03
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Notes
History