Damping-enabling technologies for broadband control of piezo-stages: A survey

Piezo-actuated nanopositioning stages, denoted as piezo-stages, have become more and more popular in high-speed and high-precision operation, such as high-speed scanning imaging in atomic force microscope (AFM), and stepping–scanning lithography based on wafer stages. But lightly damping dynamics largely limits motion control bandwidth and trajectory tracking performance of the piezo-stages after piezoelectric hysteresis has been well...