Review paper

Toward growth of wafer-scale single-crystal hexagonal boron nitride sheets

Volume: 2, Issue: 3, Pages: 031004 - 031004
Published: Sep 1, 2021
Abstract
Hexagonal boron nitride (hBN) has a two-dimensional planar structure without dangling bonds and is considered an insulator material that can overcome the limitations of SiO2 and HfO2, which typically exhibit large densities of dangling bonds and charged impurities at the interface. However, most of the reported hBN films prepared by chemical vapor deposition (CVD) are polycrystalline with grain boundaries. The grain boundaries of a...
Paper Details
Title
Toward growth of wafer-scale single-crystal hexagonal boron nitride sheets
Published Date
Sep 1, 2021
Volume
2
Issue
3
Pages
031004 - 031004
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