A high-cooperativity, nano-optomechanical system comprised of high stress Si3N4
Published: Jan 1, 2021
Abstract
We report the design fabrication and characterization of a monolithic nano-optomechanical transducer comprised of high stress silicon nitride (Si 3 N 4 ). Our system features a one dimensional Fabry-Pérot photonic crystal cavity ( Q ≈ 10 5 ) integrated with a high- Q ( Q ≈ 10 6 ) nanobeam resonator with optomechanical cooperativity of C 0 =...
Paper Details
Title
A high-cooperativity, nano-optomechanical system comprised of high stress Si3N4
Published Date
Jan 1, 2021
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