Development of a Navigation-Grade MEMS IMU

Performance data is presented from a MEMS-based IMU being developed at Honeywell with the objective of navigation-grade performance for a variety of applications. Design of the gyroscope is derived from that of the gyroscope in Honeywell's HG1930 tactical-grade MEMS IMU, a widely used tactical-grade MEMS IMU product. Fabrication processes similar to that of the gyroscope are used to fabricate a new vibrating beam accelerometer which measures...