Process (computing)

Engineering

Automation

Fabrication

Materials science

Systems engineering

Operating system

Computer science

Humidity

Mechanical engineering

Alternative medicine

Thermodynamics

Physics

Nanotechnology

Wafer

Process engineering

Medicine

Meteorology

Semiconductor device fabrication

Pathology

ACS Omega

In the past decade, humidity measurements have ubiquitously gained consideration in the wide range of application paradigms such as industrial predictive maintenance, instrumentation, automation, agriculture, climate monitoring, healthcare, and semiconductor industries. Accurate humidity measurements and cost-effective fabrication processes for large-volume and high-performance sensors with flexible form factors are essential to meet the stringent performance requirements of the emerging application areas. To address this need, recent efforts focus on development of innovative sensing modalities, process technologies, and exploration and integration of new materials to enable low-cost, robust, and flexible humidity sensors with ultrahigh sensitivity and linearity, large dynamic range, low hysteresis, and fast response time. In this review paper, we present an overview of flexible humidity sensors based on distinct sensing mechanisms, employed processing techniques, and various functional sensing layers and substrate materials for specific applications. Furthermore, we present the critical device design parameters considered to be indicative of sensor performance such as relative humidity range, along with a discussion on some of the specific applications and use cases.

Fabrication and Materials Integration of Flexible Humidity Sensors for Emerging Applications