Sputter deposition

Engineering

Metallurgy

Materials science

Ceramic

Perovskite (structure)

Chemical engineering

Barium titanate

Physics

Nanotechnology

Organic chemistry

Dielectric

Titanate

Thin film

Strontium

Strontium titanate

Chemistry

Optoelectronics

Sputtering

Engineering physics

Coatings

In this work, a broad overview in the field of strontium titanate (ST, SrTiO3)-, barium titanate (BT, BaTiO3)- and barium strontium titanate (BST, BaSrTiO3)-based gas sensors is presented and discussed. The above-mentioned materials are characterized by a perovskite structure with long-term stability and therefore are very promising materials for commercial gas-sensing applications. Within the last 20 years, the number of papers where ST, BT and BST materials were tested as gas-sensitive materials has ten times increased and therefore an actual review about them in this field has been expected by readers, who are researchers involved in gas-sensing applications and novel materials investigations, as well as industry research and development center members, who are constantly searching for gas-sensing materials exhibiting high 3S parameters (sensitivity, selectivity and stability) that can be adapted for commercial realizations. Finally, the NO2-sensing characteristics of the BST-based gas sensors deposited by the authors with the utilization of magnetron sputtering technology are presented.

Semiconducting Metal Oxides: SrTiO3, BaTiO3 and BaSrTiO3 in Gas-Sensing Applications: A Review