Integral terminal sliding-mode-based adaptive integral backstepping control for precision motion of a piezoelectric ultrasonic motor

The versatile and effective piezoelectric ultrasonic motor (PUM) has been widely used in many significant industrial and scientific applications, including precision positioning systems and surgical devices. However, the inherent friction, hysteresis nonlinearity, model uncertainties as well as various invariably presented external disturbances bring great challenges on the precision motion of PUM. In this development, a novel integral terminal...