Original paper
Selective laser ablation and patterning on Ag thin films with width and depth control
Volume: 31, Issue: 6, Pages: 4943 - 4955
Published: Feb 15, 2020
Abstract
Silver (Ag) films were deposited on glass substrates by radio frequency (RF) magnetron sputtering and then ablated by a 532 nm nanosecond pulsed laser. The effects of laser fluence and defocusing amount on the width and depth of laser-ablated grooves on 100- and 600-nm-thick Ag films were systematically investigated under single- and multi-scan ablation. The results suggested that the Ag films could be successfully removed from the substrate...
Paper Details
Title
Selective laser ablation and patterning on Ag thin films with width and depth control
Published Date
Feb 15, 2020
Volume
31
Issue
6
Pages
4943 - 4955
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Notes
History