Experimental investigation and theoretical modelling on nonlinear dynamics of cantilevered microbeams

The nonlinear vibration of cantilever nickel microbeams with thickness in micron level is investigated through experiment and theory. A non-contact dynamic vibration measurement system is built to test the fundamental linear frequency and the nonlinear amplitude-frequency curves near the primary resonance. Experimental result reveals the nonlinear amplitude-frequency curves exhibit a marked weak softening-type behavior as well as hysteresis...