Original paper
Replication of a glass microlens array using a vitreous carbon mold
Abstract
A low-cost fabrication method for a high-surface-quality glass microlens array (MLA) was proposed using a glass molding technique with a vitreous carbon (VC) mold. A VC mold with a high-surface-quality MLA cavity was fabricated, and the glass MLA with a root mean square surface roughness of 4.59 nm was replicated using the VC mold. To obtain the glass MLA with high replication quality, the effects of molding conditions were examined. The surface...
Paper Details
Title
Replication of a glass microlens array using a vitreous carbon mold
Published Date
May 29, 2018
Journal
Volume
26
Issue
12
Pages
14936 - 14936
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Notes
History