Replication of a glass microlens array using a vitreous carbon mold

A low-cost fabrication method for a high-surface-quality glass microlens array (MLA) was proposed using a glass molding technique with a vitreous carbon (VC) mold. A VC mold with a high-surface-quality MLA cavity was fabricated, and the glass MLA with a root mean square surface roughness of 4.59 nm was replicated using the VC mold. To obtain the glass MLA with high replication quality, the effects of molding conditions were examined. The surface...