Nonlinear mechanics of electrically actuated microplates

The three-dimensional nonlinear mechanics and pull-in characteristics of a microplate-based microelectromechanical system (MEMS) are investigated via a multi-degree freedom energy-based technique where the in-plane and out-of-plane motions are retained in the modelling and simulations; the deformable microplate is modelled using the Kirchhoff's plate theory in conjunction with von Kármán nonlinear strains, and it is assumed to be fully clamped...