Advances in piezoelectric thin films for acoustic biosensors, acoustofluidics and lab-on-chip applications
Abstract
Recently, piezoelectric thin films including zinc oxide (ZnO) and aluminium nitride (AlN) have found a broad range of lab-on-chip applications such as biosensing, particle/cell concentrating, sorting/patterning, pumping, mixing, nebulisation and jetting. Integrated acoustic wave sensing/microfluidic devices have been fabricated by depositing these piezoelectric films onto a number of substrates such as silicon, ceramics, diamond, quartz, glass,...
Paper Details
Title
Advances in piezoelectric thin films for acoustic biosensors, acoustofluidics and lab-on-chip applications
Published Date
Aug 1, 2017
Volume
89
Pages
31 - 91
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