A molecular-level analysis of gas-phase reactions in chemical vapor deposition of carbon from methane using a detailed kinetic model

This work describes a modeling study of methane pyrolysis in chemical vapor deposition (CVD). The model consists of a detailed chemical kinetic model, which includes 241 species and 909 gas-phase reactions for methane pyrolysis mechanism, and a plug-flow model, which describes the transport conditions in CVD. Reasonably good agreements were obtained between the simulation results and the experimental results of methane pyrolysis in CVD of...