Review paper
Nanotribology and MEMS
Abstract
The tribological phenomena of adhesion, friction, and wear arise when solid objects make contact. As the size of devices shrinks to micro- and nanoscales, the surface-to-volume ratio increases and the effects of body forces (gravity and inertia) become insignificant compared with those of surface forces (van der Waals, capillary, electrostatic, and chemical bonding). In microelectromechanical systems (MEMS), tribological and static interfacial...
Paper Details
Title
Nanotribology and MEMS
Published Date
Oct 1, 2007
Journal
Volume
2
Issue
5
Pages
22 - 29
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