Cathode shape prediction for uniform electrochemical dissolution of array tools for ECDM applications

The effect of various cathode shapes, i.e., flat-plate, conical, and spherical-shaped cathodes, on the electrochemical dissolution (ECD) behavior of the 3 × 3 area-array tool electrode is presented. The allowed variation in all tip heights is less than 30 μm. Initially, the finite element method (FEM) was used to predicts the reduction in size and heights of the 3 × 3 tips. The spherical shape cathode exhibited uniform current density...