Hydrogenated Amorphous Silicon Carbide: A Low-Loss Deposited Dielectric for Microwave to Submillimeter-Wave Superconducting Circuits

Low-loss deposited dielectrics will benefit superconducting devices such as integrated superconducting spectrometers, superconducting qubits and kinetic inductance parametric amplifiers. Compared with planar structures, multi-layer structures such as microstrips are more compact and eliminate radiation loss at high frequencies. Multi-layer structures are most easily fabricated with deposited dielectrics, which typically exhibit higher dielectric...