3D electron backscatter diffraction characterization of fine α titanium microstructures: collection, reconstruction, and analysis methods

3D electron backscatter diffraction (3D-EBSD) is a method of obtaining 3-dimensional crystallographic data through serial sectioning. The recent advancement of using a Xe+ plasma focused ion beam for sectioning along with a complementary metal-oxide semiconductor based EBSD detector allows for an improvement in the trade-off between volume analyzed and spatial resolution over most other 3D characterization techniques. Recent publications from...