Investigating internal resonances and 3:1 modal interaction in an electrostatically actuated clamped-hinged microbeam

In this paper, we investigated the realization of all possible internal resonance conditions between the first three modes of an electrostatically actuated, straight, clamped-hinged microbeam. We first obtained the static displacement and the first three natural frequencies around the deflected shape of the beam by using Galerkin based reduced order model and the finite element method. We then found all six possible commensurable relations...