Electrical engineering

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Current density

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Deposition (geology)

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Thin film

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ACS Applied Energy Materials

To power miniaturized and smart electronic devices, lithium-ion microbatteries with high energy densities remain the most attractive solution. The Ni-substituted LiMn2O4 spinel material seems to be the most promising high-performance electrodes to significantly enhance the energy density of Li-ion microbatteries. Sputtered LiNi0.5Mn1.5O4 (LNMO) films deposited on a metallic current collector are known to deliver high capacity values with high rate capabilities. In this paper, we propose a detailed study on the influence of sputtering deposition parameters (gas flow rate and bias voltage) to optimize the electrochemical properties of the electrodes and to carefully investigate the structure–electrochemical property relationship.

Sputtered LiNi0.5Mn1.5O4 Thin Films for Lithium-Ion Microbatteries