Charge injection and decay of nanoscale dielectric films resolved via dynamic scanning probe microscopy

To satisfy continual demands for higher performance dielectrics in multi‐layer ceramic capacitors and related microelectronic devices, novel characterization methods are necessary for mapping materials properties down to the nanoscale, where enabling materials developments are increasingly relevant. Accordingly, an atomic force microscopy‐based approach is implemented for characterizing insulator performance based on the mapping of discharging...