Original paper
Detailed gas-phase kinetics and reduced reaction mechanism for methane pyrolysis involved in CVD/CVI processes
Volume: 154, Pages: 104998 - 104998
Published: Mar 1, 2021
Abstract
A detailed gas-phase kinetic model consisting of 37 species and 318 reactions is developed for methane pyrolysis involved in the chemical vapour deposition/infiltration (CVD/CVI) processes. The model was used to perform the simulations of CH4 pyrolysis in a hot-wall CVD reactor over a wide range of operating conditions and validated against the experimental data. The overall trend of the concentration profiles of notable species is in good...
Paper Details
Title
Detailed gas-phase kinetics and reduced reaction mechanism for methane pyrolysis involved in CVD/CVI processes
Published Date
Mar 1, 2021
Volume
154
Pages
104998 - 104998
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