Detailed gas-phase kinetics and reduced reaction mechanism for methane pyrolysis involved in CVD/CVI processes

A detailed gas-phase kinetic model consisting of 37 species and 318 reactions is developed for methane pyrolysis involved in the chemical vapour deposition/infiltration (CVD/CVI) processes. The model was used to perform the simulations of CH4 pyrolysis in a hot-wall CVD reactor over a wide range of operating conditions and validated against the experimental data. The overall trend of the concentration profiles of notable species is in good...