doi.org/10.1016/j.conengprac.2020.104673

Prediction of material removal rate in chemical mechanical polishing via residual convolutional neural network

..., Shen Yin
77
Control Engineering Practice4.60
Volume: 107, Pages: 104673 - 104673
Published: Nov 19, 2020
Paper Fields
Paper Details
Title
Prediction of material removal rate in chemical mechanical polishing via residual convolutional neural network
DOI
doi.org/10.1016/j.conengprac.2020.104673
Published Date
Nov 19, 2020
Journal
Control Engineering Practice
Volume
107
Pages
104673 - 104673
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