A Miniaturized Dual-Slider Linear Actuator Using Electrostatic Adhesion and Inertia Drive
Abstract
Dual-slider positioning in a miniaturized system is crucial in many industrial applications. This paper presents a miniaturized dual-slider linear actuator by employing one piezoelectric element (PZT) and integrating the methods of electrostatic adhesion and inertia drive. Two inertia drive methods can be converted by clamping and releasing one of the sliders on a base. Two thin-film electrodes are mounted on the base for clamping and releasing...
Paper Details
Title
A Miniaturized Dual-Slider Linear Actuator Using Electrostatic Adhesion and Inertia Drive
Published Date
Nov 12, 2020
Journal
Volume
9
Issue
4
Pages
114 - 114
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