Geometry assessment of ultra-short pulsed laser drilled micro-holes

Volume: 117, Issue: 7-8, Pages: 2445 - 2452
Published: Oct 23, 2020
Abstract
Ultra-short pulsed laser ablation enables a defined generation of micro-holes. A parameter study on the ablation characteristics of copper clearly reveals a benefit for green wavelength with lower threshold fluence, simultaneously increasing the Rayleigh length. The use of a circular drilling method allows a defined manufacturing of micro boreholes and micro through-holes with 35 μm diameter of up to 165 μm and 300 μm length. Introducing...
Paper Details
Title
Geometry assessment of ultra-short pulsed laser drilled micro-holes
Published Date
Oct 23, 2020
Volume
117
Issue
7-8
Pages
2445 - 2452
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