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doi.org/10.1038/s41378-020-00183-5
Original paper
AlN MEMS filters with extremely high bandwidth widening capability
Anming Gao
14
,
Kangfu Liu
8
,
...,
Tao Wu
27
View all 4 authors
Microsystems & Nanoengineering
9.90
Volume: 6, Issue: 1
Published
: Sep 7, 2020
62
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Paper Fields
Engineering
Network topology
Center frequency
Bandwidth (computing)
Microelectromechanical systems
Materials science
Operating system
Telecommunications
Computer science
Wideband
Electronic engineering
Resonator
Fractional bandwidth
Topology (electrical circuits)
Band-pass filter
Optoelectronics
Electrical engineering
Paper Details
Title
AlN MEMS filters with extremely high bandwidth widening capability
DOI
doi.org/10.1038/s41378-020-00183-5
Published Date
Sep 7, 2020
Journal
Microsystems & Nanoengineering
Volume
6
Issue
1
Notes
History
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