Bandwidth enhancement in damping control for piezoelectric nanopositioning stages with load uncertainty: Design and implementation

High bandwidth and fast tracking of desired trajectories are eagerly required in various applications that use piezoelectric nanopositioning stages, especially in atomic force microscopes where the vibration stemming from lightly damped modes of stages is a challenging control problem. In this study, a bandwidth-enhanced positive acceleration, velocity, and position feedback damping controller is presented to achieve the tracking bandwidth...