Original paper
Enhanced Odd-Harmonic Repetitive Control of Nanopositioning Stages Using Spectrum-Selection Filtering Scheme for High-Speed Raster Scanning
Volume: 18, Issue: 3, Pages: 1087 - 1096
Published: Jul 1, 2021
Abstract
Odd-harmonic repetitive control (ORC) has been successfully applied to improve the triangular trajectory tracking performance of nanopositioners. However, the conventional ORC tends to amplify the tracking errors at frequencies other than the odd-harmonic components, mainly the even harmonics of the fundamentals of the intended triangular trajectory to be tracked. Due to the influence from the hysteresis nonlinearity of the piezoelectric...
Paper Details
Title
Enhanced Odd-Harmonic Repetitive Control of Nanopositioning Stages Using Spectrum-Selection Filtering Scheme for High-Speed Raster Scanning
Published Date
Jul 1, 2021
Volume
18
Issue
3
Pages
1087 - 1096
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Notes
History